scalac: Token not found: /Users/mpa/Library/Caches/JetBrains/IntelliJIdea2021.3/compile-server/tokens/54149

What means this exception and how can I fix it?

scalac: Token not found: /Users/mpa/Library/Caches/JetBrains/IntelliJIdea2021.3/compile-server/tokens/54149

I have a Scala 3 project in IntelliJ 2021.3:

It seamed to appear randomly when building the project with IntelliJ.

I tried:

• sbt clean / sbt compile and sbt reload.
• close IntelliJ / delete .idea folder and open Project newly.

Using sbt works just fine. So adjusting the config like this works, but I want to use the build from IntelliJ: