Azure Service Fabric VMExtensionProvisioningError

I am trying to create secure service fabric cluster from Azure Portal with primary certificate uploaded to key-vault.

All required resources are being created. Exception occurs on Virtual machine scale set, operation Write VirtualMachineScaleSets reports:

 "properties": {
        "statusCode": "Conflict",
        "statusMessage": "{\"status\":\"Failed\",\"error\":{\"code\":\"ResourceDeploymentFailure\",\"message\":\"The resource operation completed with terminal provisioning state 'Failed'.\",\"details\":[{\"code\":\"VMExtensionProvisioningError\",\"message\":\"VM has reported a failure when processing extension 'VMDiagnosticsVmExt_vmNodeType0Name'. Error message: \\\"Monitoring Agent not reporting success after launch\\\".\"}]}}"
    }

Because internal operation Write Deployments is being failed, and no detailed message.