What's the difference between @ and $ and % in MSBuild?

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What are the differences when referring to variables in MSBuild. For example in the following there is a @ and $ and as well as a % used.

<Copy SourceFiles="@(Files)" DestinationFolder="$(TempBuildDir)\%(RecursiveDir)">
   <Output TaskParameter="CopiedFiles" ItemName="DeployFiles" />
</Copy>
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